Optical Properties of the Refractory Metals at High Temperatures

Chirumamilla, M.; Arya, M.; Ganguly, A.; Rout, S.S.; Krishnamurthy, G.V.; Krekeler, T.; Ritter, M.; Störmer, M.; Petrov, A.Y.; Eich, M.

Confpaper

Optical Properties of the Refractory Metals at High Temperatures

Abstract

We measure and compare the optical properties of thin refractory metal films (TiN, W, Mo and Ir) at temperatures up to 1000 °C. In-situ ellipsometry is used to measure the optical constants. Refractory metals show long-term structural stability at 1000 °C for 120 h.

DOI Link to Publication

URL: https://publications.hereon.de/id/50168/
Authors:Chirumamilla, M., Arya, M., Ganguly, A., Rout, S.S., Krishnamurthy, G.V., Krekeler, T., Ritter, M., Störmer, M., Petrov, A.Y., Eich, M.
Year:2021
In: Conference on Lasers and Electro-Optics, CLEO 2021
Pages:STu1C.6
Publisher:Institute of Electrical and Electronics Engineers Inc.
Type:Confpaper
ISBN: 978-1-943580-91-0
Cite as: Chirumamilla, M.; Arya, M.; Ganguly, A.; Rout, S.S.; Krishnamurthy, G.V.; Krekeler, T.; Ritter, M.; Störmer, M.; Petrov, A.Y.; Eich, M.: Optical Properties of the Refractory Metals at High Temperatures. In: Conference on Lasers and Electro-Optics, CLEO 2021. 2021. STu1C.6. (DOI: /10.1364/CLEO_SI.2021.STu1C.6) (ISBN: 978-1-943580-91-0)