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AP0128 - Magnesium Nitride Phase Formation Through New Ion Beam Implantation Technique

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  • URL: https://publications.hereon.de/id/31061/
  • Authors:Hoeche, D., Stoermer, M.
  • Year:2013
  • In: Hiden Analytical, Surface Science & Materials Analysis, IG20 5 KeV Argon or Oxygen ion source for UHV surface analysis applications
  • Pages:APO128
  • Cite as: Hoeche, D.; Stoermer, M.: AP0128 - Magnesium Nitride Phase Formation Through New Ion Beam Implantation Technique. In: Hiden Analytical, Surface Science & Materials Analysis, IG20 5 KeV Argon or Oxygen ion source for UHV surface analysis applications. 2013. APO128.
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