AbstractThe interaction of free electron laser pulses with grating structure is investigated using 4.6 0.1 nm radiation at the FLASH facility in Hamburg. For fluences above 63.7 8.7 mJ∕cm2, the interaction triggers a damage process starting
at the edge of the grating structure as evidenced by optical and atomic force microscopy. Simulations based on solution of the Helmholtz equation demonstrate an enhancement of the electric field intensity distribution at the edge of the grating structure. A procedure is finally deduced to evaluate damage threshold.