Authors:Jebril, S., Mishra, Y.K., Elbahri, M., Kienle, L., Greve, H., Quandt, E., Adelung, R.
Year:2009
In: International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2009
Location:Berlin (D)
Date:25.-29.08.2009
Cite as: Jebril, S.; Mishra, Y.K.; Elbahri, M.; Kienle, L.; Greve, H.; Quandt, E.; Adelung, R.: Using thin film stress for nanoscaled sensors. In: International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2009. Berlin (D), 25.-29.08.2009, 2009.
