Authors:Jebril, S.,Mishra, Y.K.,Elbahri, M.,Kienle, L.,Greve, H.,Quandt, E.,Adelung, R.
Year:2009
In: International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2009
Location:Berlin (D)
Date:25.-29.08.2009
Type:conference lecture
Cite as: Jebril, S.; Mishra, Y.; Elbahri, M.; Kienle, L.; Greve, H.; Quandt, E.; Adelung, R.: Using thin film stress for nanoscaled sensors. International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2009. Berlin (D), 2009.
