A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering
No abstract available.
URL: https://publications.hereon.de/id/25999/
Authors:Schell, N.,Borany, J.v.,Hauser, J.
Year:2006
In: 9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006
Location:Daegu (ROK)
Date:28.05.-02.07.2006
Type:conference poster
Cite as: Schell, N.; Borany, J.; Hauser, J.: A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering. In: 9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006. Daegu (ROK). 2006.
