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journal article

A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation

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  • URL: https://publications.hereon.de/id/21939/
  • Authors:Schwenke, H.,Beaven, P.,Knoth, J.,Jantzen, E.
  • Year:2003
  • In: Spectrochimica Acta A
  • Volume:58
  • Issue:12
  • Pages:2039-2048
  • Type:journal article
  • ISSN: 0584-8547
  • Cite as: Schwenke, H.; Beaven, P.; Knoth, J.; Jantzen, E.: A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation. Spectrochimica Acta A. 2003. vol. 58, no. 12, 2039-2048. DOI: 10.1016/S0584-8547(03)00188-5
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