A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry

Publication

No abstract available.

URL: https://publications.hereon.de/id/21908/
Authors:Schwenke, H., Knoth, J., Beaven, P., Kiehn, R., Buhrz, J.
Year:2003
In: 10th International Conference on Total Reflection X-Ray Fluorescence Analysis, TXRF 2003
Location:Hyogo (J)
Date:14.-19.09.2003
Cite as: Schwenke, H.; Knoth, J.; Beaven, P.; Kiehn, R.; Buhrz, J.: A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry. In: 10th International Conference on Total Reflection X-Ray Fluorescence Analysis, TXRF 2003. Hyogo (J), 14.-19.09.2003, 2003.