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conference lecture
A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry
No abstract available.
URL:
https://publications.hereon.de/id/21908/
Authors:
Schwenke, H.,Knoth, J.,Beaven, P.,Kiehn, R.,Buhrz, J.
Year:
2003
In:
10th International Conference on Total Reflection X-Ray Fluorescence Analysis, TXRF 2003
Location:
Hyogo (J)
Date:
14.-19.09.2003
Type:
conference lecture
Cite as:
Schwenke, H.; Knoth, J.; Beaven, P.; Kiehn, R.; Buhrz, J.: A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry. 10th International Conference on Total Reflection X-Ray Fluorescence Analysis, TXRF 2003. Hyogo (J), 2003.
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