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Total Reflection and Grazing Emission X-Ray Fluorescence Spectrometry: Assessment of the size of Contaminant Particles on Silicon Wafer Surfaces

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  • URL: https://publications.hereon.de/id/21904/
  • Authors:Schwenke, H., Beaven, P., Knoth, J.
  • Year:2002
  • In: Particles on Surfaces 7: Detection, Adhesion and Removal
  • Pages:11 - 26
  • Type:Inbook
  • ISBN: 90-6764-372-6
  • Cite as: Schwenke, H.; Beaven, P.; Knoth, J.: Total Reflection and Grazing Emission X-Ray Fluorescence Spectrometry: Assessment of the size of Contaminant Particles on Silicon Wafer Surfaces. In: Mittal, K.L. (Hrsg.): Particles on Surfaces 7: Detection, Adhesion and Removal. 2002. 11 - 26. (ISBN: 90-6764-372-6)
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