A new technique for depth profiling on a nanometer scale
No abstract available.
URL: https://publications.hereon.de/id/17054/
Authors:Schwenke, H.,Knoth, J.,Guenther, R.,Wiener, G.,Bormann, R.
Year:1996
In: MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures
Pages:407-412
Type:conference paper,conference lecture
Cite as: Schwenke, H.; Knoth, J.; Guenther, R.; Wiener, G.; Bormann, R.: A new technique for depth profiling on a nanometer scale. In: Prokes, S.; Cammatata, R.; Christou, A. (Ed.): MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures. 1996. 407-412.
