A new technique for depth profiling on a nanometer scale
No abstract available.
URL: https://publications.hereon.de/id/17054/
Authors:Schwenke, H., Knoth, J., Guenther, R., Wiener, G., Bormann, R.
Year:1996
In: MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures
Pages: 407 - 412
Type:Confpaper
Cite as: Schwenke, H.; Knoth, J.; Guenther, R.; Wiener, G.; Bormann, R.: A new technique for depth profiling on a nanometer scale. In: Prokes, S.M.; Cammatata, R C.; Christou, A. (Eds.): MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures. 1996. 407 - 412.
