Ion beam sputtering techniques for high-resolution concentration depth profiling with glancing-incidence X-ray fluorescence spectrometry

journal article

No abstract available.

URL: https://publications.hereon.de/id/13262/
Authors:Wiener, G.,Guenther, R.,Michaelsen, C.,Knoth, J.,Schwenke, H.,Bormann, R.
Year:1997
In: Spectrochimica Acta B
Volume:52
Pages:813-821
Type:journal article
ISSN: 0584-8547
Cite as: Wiener, G.; Guenther, R.; Michaelsen, C.; Knoth, J.; Schwenke, H.; Bormann, R.: Ion beam sputtering techniques for high-resolution concentration depth profiling with glancing-incidence X-ray fluorescence spectrometry. Spectrochimica Acta B. 1997. vol. 52, 813-821.