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Journalpaper

Ion beam sputtering techniques for high-resolution concentration depth profiling with glancing-incidence X-ray fluorescence spectrometry

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  • URL: https://publications.hereon.de/id/13262/
  • Authors:Wiener, G., Guenther, R., Michaelsen, C., Knoth, J., Schwenke, H., Bormann, R.
  • Year:1997
  • In: Spectrochimica Acta B
  • Volume:52
  • Pages: 813 - 821
  • Type:Journalpaper
  • ISSN: 0584-8547
  • Cite as: Wiener, G.; Guenther, R.; Michaelsen, C.; Knoth, J.; Schwenke, H.; Bormann, R.: Ion beam sputtering techniques for high-resolution concentration depth profiling with glancing-incidence X-ray fluorescence spectrometry. In: Spectrochimica Acta B. Vol. 52 (1997) 813 - 821.
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