Ion beam synthesis of deep buried NiSi2 layers in silicon by 6 MeV Ni implantation
No abstract available.
URL: https://publications.hereon.de/id/12585/
Authors:Lindner, J. K. N., Klassen, T., Kaat, E. H. te
Year:1991
In: Nuclear Instruments and Methods in Physics Research B
Volume:5960
Pages: 655-659
Type:Journalpaper
ISSN: 0168-583X
Cite as: Lindner, J. K. N.; Klassen, T.; Kaat, E. H. te: Ion beam synthesis of deep buried NiSi2 layers in silicon by 6 MeV Ni implantation. In: Nuclear Instruments and Methods in Physics Research B. Vol. 5960 (1991) 655-659.
