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Journalpaper

Determination of concentration depth profiles using total-reflection X-ray fluorescence spectrometry in combination with ion-beam etching

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  • URL: https://publications.hereon.de/id/12290/
  • Authors:Guenther, R., Wiener, G., Knoth, J., Schwenke, H., Bormann, R.
  • Year:1996
  • In: Review of Scientific Instruments
  • Volume:67
  • Issue:6
  • Pages: 2332 - 2336
  • Type:Journalpaper
  • ISSN: 0034-6748
  • Cite as: Guenther, R.; Wiener, G.; Knoth, J.; Schwenke, H.; Bormann, R.: Determination of concentration depth profiles using total-reflection X-ray fluorescence spectrometry in combination with ion-beam etching. In: Review of Scientific Instruments. Vol. 67 (1996) 6, 2332 - 2336.
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