%0 conference paper
%@ 1613-0073
%A Joseph, R., Chauhan, A., Eschke, C., Ihsan, A.Z., Jalali, M., Jäntsch, U., Jung, N., Shyam Kumar, C.N., Kübel, C., Lucas, C., Mail, M., Mazilkin, A., Neidiger, C., Panighel, M., Sandfeld, S., Stotzka, R., Thelen, R., Aversa, R.

%D 2021
%J CEUR Workshop Proceedings : Supplementary 23rd International Conference on Data Analytics and Management in Data Intensive Domains, DAMDID/RCDL 2021

%P 265-277 

%T Metadata schema to support FAIR data in scanning electron microscopy
%U 
 
%X The development and the adoption of metadata schemas and standards are a key aspect in data management. In this paper, we introduce our approach to a metadata model in the field of Materials Science. We present the specific use case of a metadata schema for Scanning Electron Microscopy, a characterization technique which is routinely used in Materials Science. This metadata schema is aiming to be a de-facto standard which will be openly available for reuse and further extension to other electron microscopy techniques. Copyright © 2021 for this paper by its authors.