@misc{landlv_phase_evolution_2019, author={Landälv, L., Rogström, L., Lu, J., Ostach, D., Eriksson, F., Junaid, M., Ghafoor, N., Ekström, E., Hsiao, C., Leiste, H., Ahlgren, M., Göthelid, E., Alling, B., Hultmann, L., Stüber, M., Schell, N., Birch, J., Eklund, P.}, title={Phase evolution of radio frequency magnetron sputtered Cr-rich (Cr,Zr)2O3 coatings studied by in situ synchrotron X-ray diffraction during annealing in air or vacuum}, year={2019}, howpublished = {journal article}, doi = {https://doi.org/10.1557/jmr.2019.340}, abstract = {The phase evolution of reactive radio frequency (RF) magnetron sputtered Cr0.28Zr0.10O0.61 coatings has been studied by in situ synchrotron X-ray diffraction during annealing under air atmosphere and vacuum. The annealing in vacuum shows t-ZrO2 formation starting at ∼750–800 °C, followed by decomposition of the α-Cr2O3 structure in conjunction with bcc-Cr formation, starting at ∼950 °C. The resulting coating after annealing to 1140 °C is a mixture of t-ZrO2, m-ZrO2, and bcc-Cr. The air-annealed sample shows t-ZrO2 formation starting at ∼750 °C. The resulting coating after annealing to 975 °C is a mixture of t-ZrO2 and α-Cr2O3 (with dissolved Zr). The microstructure coarsened slightly during annealing, but the mechanical properties are maintained, with no detectable bcc-Cr formation. A larger t-ZrO2 fraction compared with α-Cr2O3 is observed in the vacuum-annealed coating compared with the air-annealed coating at 975 °C. The results indicate that the studied pseudo-binary oxide is more stable in air atmosphere than in vacuum.}, note = {Online available at: \url{https://doi.org/10.1557/jmr.2019.340} (DOI). Landälv, L.; Rogström, L.; Lu, J.; Ostach, D.; Eriksson, F.; Junaid, M.; Ghafoor, N.; Ekström, E.; Hsiao, C.; Leiste, H.; Ahlgren, M.; Göthelid, E.; Alling, B.; Hultmann, L.; Stüber, M.; Schell, N.; Birch, J.; Eklund, P.: Phase evolution of radio frequency magnetron sputtered Cr-rich (Cr,Zr)2O3 coatings studied by in situ synchrotron X-ray diffraction during annealing in air or vacuum. Journal of Materials Research. 2019. vol. 34, no. 22, 3735-3746. DOI: 10.1557/jmr.2019.340}}