%0 journal article
%@ 1742-6588
%A Marschall, F., Last, A., Simon, M., Kluge, M., Nazmov, V., Vogt, H., Ogurreck, M., Greving, I., Mohr, J.

%D 2014
%J Journal of Physics: Conference Series

%P 012007 
%R doi:10.1088/1742-6596/499/1/012007
%T X-ray Full Field Microscopy at 30 keV
%U https://doi.org/10.1088/1742-6596/499/1/012007
 
%X In our X-ray full field microscopy experiments, we demonstrated a resolution better than 260 nm over the entire field of view of 80 μm × 80 μm at 30 keV. Our experimental setup at PETRA III, P05, had a length of about 5 m consisting of an illumination optics, an imaging lens and a detector. For imaging, we used a compound refractive lens (CLR) consisting of mr-L negative photo resist, which was fabricated by deep X-ray lithography. As illumination optics, we choose a refractive rolled X-ray prism lens, which was adapted to the numerical aperture of the imaging lens.