%0 conference paper %@ 1877-7058 %A Ai, M., Shishatskiy, S., Wind, J., Beyer, A., Qiu, J., Goelzhaeuser, A. %D 2012 %J Procedia Engineering %P 61-62 %R doi:10.1016/j.proeng.2012.08.307 %T Gas Permeation through PDMS Membranes Covered by 1 or 3 nm Thick Carbon Nanomembranes (CNMs) %U https://doi.org/10.1016/j.proeng.2012.08.307 %X No abstract