%0 conference lecture
%@ 
%A Jebril, S., Mishra, Y.K., Elbahri, M., Kienle, L., Greve, H., Quandt, E., Adelung, R.

%D 2009
%J International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2009

 

%T Using thin film stress for nanoscaled sensors
%U 
 
%X