%0 journal article
%@ 0042-207X
%A Martins, R.M.S., Schell, N., Borany, J.V., Mahesh, K.K., Silva, R.J.C., Braz Fernandes, F.M.

%D 2010
%J Vacuum
%N 7
%P 913-919 
%R doi:10.1016/j.vacuum.2009.12.012
%T Structural evolution of magnetron sputtered shape memory alloy Ni–Ti films
%U https://doi.org/10.1016/j.vacuum.2009.12.012
7 
%X Additionally, an ion gun had been commissioned, which allows ion bombardment during sputter deposition or post-deposition ion irradiation. In this first series of experiments, a Ni–Ti film was irradiated with He ions after deposition (without exposing the film to the atmosphere, i.e., avoiding surface oxide formation), thus modifying deliberately the microstructure of the film locally.