%0 Poster %@ %A Schell, N. %A Borany, J.v. %A Hauser, J. %D 2006 %J 9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006 %T A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering %U %X