@inproceedings{schell_a_two_2006, 
author={Schell, N. and Borany, J.v. and Hauser, J.},
title={A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering},
year={2006},
booktitle = {9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006},
note = {Schell, N.; Borany, J.v.; Hauser, J.: A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering. In: 9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006. Daegu (ROK), 28.05.-02.07.2006, 2006.}}