@inproceedings{schell_a_two_2006, author={Schell, N. and Borany, J.v. and Hauser, J.}, title={A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering}, year={2006}, booktitle = {9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006}, note = {Schell, N.; Borany, J.v.; Hauser, J.: A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering. In: 9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006. Daegu (ROK), 28.05.-02.07.2006, 2006.}}