%0 conference poster
%@ 
%A Hellin, D., Rip, J., Delabie, A., Bonzom, R., Beaven, P., De Gendt, S., Vinckier, C.

%D 2005
%J International Conference on Total Reflection X-Ray Fluorescence and Related Methods, TXRF 2005

 

%T TXRF Layer Analysis for Advanced Micro-Electronic Applications: Two Case Studies- HfO2 on Si and Si on Ge
%U 
 
%X