@misc{hellin_grazing_incidence_2005, 
author={Hellin, D., Delabie, A., Puurunen, R., Beaven, P., Conard, T., Brijs, B., de Gendt, S., Vinckier, C.},
title={Grazing incidence - X-ray Fluorescence Spectrometry for the Compositional Analysis of Nanometer-thin High- dielectric HfO2 layers},
year={2005},
howpublished = {journal article},
doi = {https://doi.org/10.2116/analsci.21.845},
abstract = {In this paper, we evaluate the use of grazing incidence – and total reflection – X-ray fluorescence spectrometry (GI-XRF and TXRF) for Cl trace analysis in nanometer-thin HfO2 films deposited using ALD. First, the results from different X-ray analysis approaches for the determination of Hf coverage are compared with the results from Rutherford backscattering spectrometry (RBS). Next, we discuss the selection of an appropriate X-ray excitation source for the analysis of traces within the high- layers. Finally, we combine both in a study on the accuracy of Cl determinations in HfO2 layers.},
note = {Online available at: \url{https://doi.org/10.2116/analsci.21.845} (DOI). Hellin, D.; Delabie, A.; Puurunen, R.; Beaven, P.; Conard, T.; Brijs, B.; de Gendt, S.; Vinckier, C.: Grazing incidence - X-ray Fluorescence Spectrometry for the Compositional Analysis of Nanometer-thin High- dielectric HfO2 layers. Analytical Sciences. 2005. vol. 21, no. 7, 845-850. DOI: 10.2116/analsci.21.845}}