@misc{schwenke_a_laser_2004, author={Schwenke, H., Knoth, J., Beaven, P., Kiehn, R., Buhrz, J.}, title={A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry}, year={2004}, howpublished = {journal article}, note = {Schwenke, H.; Knoth, J.; Beaven, P.; Kiehn, R.; Buhrz, J.: A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry. Spectrochimica Acta B. 2004. vol. 59, no. 8, 1159-1164.}}