%0 Artikel %@ 0584-8547 %A Schwenke, H. %A Beaven, P. %A Knoth, J. %A Jantzen, E. %D 2003 %J Spectrochimica Acta A %N 1722 %P 2039 - 2048 %R doi:10.1016/S0584-8547(03)00188-5 %T A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation %U http://dx.doi.org/10.1016/S0584-8547(03)00188-5 12 %X