@misc{schwenke_a_wavelengthdispersive_2003, author={Schwenke, H., Beaven, P., Knoth, J., Jantzen, E.}, title={A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation}, year={2003}, howpublished = {journal article}, doi = {https://doi.org/10.1016/S0584-8547(03)00188-5}, note = {Online available at: \url{https://doi.org/10.1016/S0584-8547(03)00188-5} (DOI). Schwenke, H.; Beaven, P.; Knoth, J.; Jantzen, E.: A Wavelength-dispersive Arrangement for Wafer Analysis with Total Reflection X-ray Fluorescence Spectrometry using Synchrotron Radiation. Spectrochimica Acta A. 2003. vol. 58, no. 12, 2039-2048. DOI: 10.1016/S0584-8547(03)00188-5}}