@misc{schwenke_a_laser_2003, 
author={Schwenke, H., Knoth, J., Beaven, P., Kiehn, R., Buhrz, J.},
title={A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry},
year={2003},
howpublished = {conference lecture: Hyogo (J);},
note = {Schwenke, H.; Knoth, J.; Beaven, P.; Kiehn, R.; Buhrz, J.: A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry. 10th International Conference on Total Reflection X-Ray Fluorescence Analysis, TXRF 2003. Hyogo (J), 2003.}}