%0 conference poster
%@ 
%A Beaven, P., Schwenke, H., Knoth, J.

%D 2002
%J Hamburg Workshop "Application of Synchrotron Radiation in Chemistry-Status and Future"

 

%T SR-TXRF Analysis of Contamination on Wafer Surfaces - Energy-dispersive vs. Wavelength-dispersive Systems
%U 
 
%X