@misc{schwenke_total_reflection_2000, 
author={Schwenke, H., Beaven, P., Knoth, J.},
title={Total Reflection and Grazing Emission X-ray Fluorescence Spectrometry: Assessment of the size of contaminant particles on silicon wafer surfaces},
year={2000},
howpublished = {conference object: Newark, NJ (USA);},
note = {Schwenke, H.; Beaven, P.; Knoth, J.: Total Reflection and Grazing Emission X-ray Fluorescence Spectrometry: Assessment of the size of contaminant particles on silicon wafer surfaces. 7. International Symposium on Particles on Surfaces: Detection, Adhesion and Removal. Newark, NJ (USA), 2000.}}