@misc{eichinger_application_of_1989, 
author={Eichinger, P., Rath, H. J., Schwenke, H.},
title={Application of total reflection X-ray fluorescence analysis for metallic trace impurities on silicon wafer surfaces},
year={1989},
howpublished = {book part},
note = {Eichinger, P.; Rath, H.; Schwenke, H.: Application of total reflection X-ray fluorescence analysis for metallic trace impurities on silicon wafer surfaces. In: ASTM Special Technical Publicaton. Philadelphia: ASTM. 1989. 305-313.}}