%0 conference lecture
%@ 
%A Schwenke, H., Knoth, J., Guenther, R., Wiener, G., Bormann, R.

%D 1996
%J MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures

%P 407-412 

%T A new technique for depth profiling on a nanometer scale
%U 
 
%X