%0 conference paper,conference lecture
%@ 
%A Schwenke, H.,Knoth, J.,Guenther, R.,Wiener, G.,Bormann, R.

%D 1996
%J MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures
%N 
%P 407-412 

%T A new technique for depth profiling on a nanometer scale
%U 
 
%X