@inproceedings{schwenke_a_new_1996, 
author={Schwenke, H. and Knoth, J. and Guenther, R. and Wiener, G. and Bormann, R.},
title={A new technique for depth profiling on a nanometer scale},
year={1996},
booktitle = {MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures},
editor = {Prokes, S.M.; Cammatata, R C.; Christou, A.},
pages = {407 - 412},
note = {Schwenke, H.; Knoth, J.; Guenther, R.; Wiener, G.; Bormann, R.: A new technique for depth profiling on a nanometer scale. In: Prokes, S.M.; Cammatata, R C.; Christou, A. (Eds.): MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures. 1996.  407 - 412.}}