@misc{schwenke_a_new_1996, author={Schwenke, H., Knoth, J., Guenther, R., Wiener, G., Bormann, R.}, title={A new technique for depth profiling on a nanometer scale}, year={1996}, howpublished = {conference lecture: ;}, note = {Schwenke, H.; Knoth, J.; Guenther, R.; Wiener, G.; Bormann, R.: A new technique for depth profiling on a nanometer scale. In: Prokes, S.; Cammatata, R.; Christou, A. (Ed.): MRS 1995 Fall Meeting: Surface/Interface and Stress Effects in Electronic Material Nanostructures. 1996. 407-412.}}