@misc{lindner_ion_beam_1991, 
author={Lindner, J. K. N., Klassen, T., Kaat, E. H. te},
title={Ion beam synthesis of deep buried NiSi2 layers in silicon by 6 MeV Ni implantation},
year={1991},
howpublished = {journal article},
note = {Lindner, J.; Klassen, T.; Kaat, E.: Ion beam synthesis of deep buried NiSi2 layers in silicon by 6 MeV Ni implantation. Nuclear Instruments and Methods in Physics Research  B. 1991. vol. 5960, 655-659.}}