@misc{berneike_surface_analysis_1989, 
author={Berneike, W., Knoth, J., Schwenke, H., Weisbrod, U.},
title={Surface analysis for Si-Wafers using total reflection X-ray fluorescence analysis},
year={1989},
howpublished = {journal article},
note = {Berneike, W.; Knoth, J.; Schwenke, H.; Weisbrod, U.: Surface analysis for Si-Wafers using total reflection X-ray fluorescence analysis. Fresenius Journal of Analytical Chemistry. 1989. vol. 333, 524-526.}}