%0 conference paper %@ %A Chirumamilla, M.,Arya, M.,Ganguly, A.,Rout, S.S.,Krishnamurthy, G.V.,Krekeler, T.,Ritter, M.,Störmer, M.,Petrov, A.Y.,Eich, M. %D 2021 %J Conference on Lasers and Electro-Optics, CLEO 2021 %N %P STu1C.6 %R doi:10.1364/CLEO_SI.2021.STu1C.6 %T Optical Properties of the Refractory Metals at High Temperatures %U https://doi.org/10.1364/CLEO_SI.2021.STu1C.6 %X We measure and compare the optical properties of thin refractory metal films (TiN, W, Mo and Ir) at temperatures up to 1000 °C. In-situ ellipsometry is used to measure the optical constants. Refractory metals show long-term structural stability at 1000 °C for 120 h.