%0 online contribution
%@ 
%A Hoeche, D.,Stoermer, M.

%D 2013
%J Hiden Analytical, Surface Science & Materials Analysis, IG20 5 KeV Argon or Oxygen ion source for UHV surface analysis applications
%N 
%P APO128 

%T AP0128 - Magnesium Nitride Phase Formation Through New Ion Beam Implantation Technique
%U 
 
%X