%0 conference lecture
%@ 
%A Jebril, S.,Mishra, Y.K.,Elbahri, M.,Kienle, L.,Greve, H.,Quandt, E.,Adelung, R.

%D 2009
%J International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2009
%N 
%P  

%T Using thin film stress for nanoscaled sensors
%U 
 
%X