%0 conference paper %@ %A Hajkova, V.,Chalupsky, J.,Wabnitz, H.,Feldhaus, J.,Stoermer, M.,Hecquet, C.,Mocek, T.,Kozlova, M.,Polan, J.,Homer, P.,Rus, B.,Juha, L. %D 2009 %J Proceedings of SPIE, International Conference on Damage to VUV, EUV, and X-Ray Optics II %N %P 736110 %R doi:10.1117/12.822950 %T Damage thresholds of various materials irradiated by 100-ps pulses of 21.2-nm laser radiation %U https://doi.org/10.1117/12.822950 %X