%0 conference poster %@ %A Schell, N.,Borany, J.v.,Hauser, J. %D 2007 %J AIP Conference Proceedings, Synchrotron Radiation Instrumentation: 9th International Conference on Synchrotron Radiation Instrumentation, SRI 2006 %N %P 1813-1816 %T A two magnetron sputter deposition chamber equipped with an additional ion gun for in situ observation of thin film growth and surface modification by synchrotron radiation scattering %U %X