%0 conference paper %@ %A Hertlein, F.,Wiesmann, J.,Michaelsen, C.,Stoermer, M.,Seifert, A. %D 2007 %J Proceeding SPIE, International Congress on Optics and Optoelectronics 2007, Damage to VUV, EUV, and X-ray Optics %N %P 658608 %R doi:10.1117/12.722452 %T State-of-the-art thin film X-ray optics for synchrotrons and FEL sources %U https://doi.org/10.1117/12.722452 %X