%0 conference paper %@ %A Juha, L.,Hajkova, V.,Chalupsky, J.,Vorlicek, V.,Ritucci, A.,Reale, A.,Zuppella, P.,Stoermer, M. %D 2007 %J Proceeding SPIE, International Congress on Optics and Optoelectronics 2007, Damage to VUV, EUV, and X-ray Optics %N %P 65860D %T Capillary-discharge 46.9-nm laser-induced damage to a-C thin films exposed to multiple laser shots below single-shot damage threshold %U %X