%0 conference poster
%@ 
%A Hellin, D.,Rip, J.,Delabie, A.,Bonzom, R.,Beaven, P.,De Gendt, S.,Vinckier, C.

%D 2005
%J International Conference on Total Reflection X-Ray Fluorescence and Related Methods, TXRF 2005
%N 
%P  

%T TXRF Layer Analysis for Advanced Micro-Electronic Applications: Two Case Studies- HfO2 on Si and Si on Ge
%U 
 
%X