%0 conference lecture %@ %A Schwenke, H.,Beaven, P.,Knoth, J.,Jantzen, E. %D 2002 %J 9th Symposium on Total Reflection X-ray Fluorescence Analysis and Related Methods %N %P %T A wavelength-dispersive arrangement for wafer analysis with total reflection X-ray fluorescence spectrometryusing synchrotron radiation %U %X