%0 journal article
%@ 0584-8547
%A Schwenke, H.,Knoth, J.,Beaven, P.,Kiehn, R.,Buhrz, J.

%D 2004
%J Spectrochimica Acta  B
%N 8
%P 1159-1164 

%T A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry
%U 
8 
%X