%0 conference lecture
%@ 
%A Schwenke, H.,Knoth, J.,Beaven, P.,Kiehn, R.,Buhrz, J.

%D 2003
%J 10th International Conference on Total Reflection X-Ray Fluorescence Analysis, TXRF 2003
%N 
%P  

%T A Laser Plasma X-ray Source for the Analysis of Wafer Surfaces by Grazing Emission X-Ray Fluorescence Spectrometry
%U 
 
%X