%0 conference poster
%@ 
%A Beaven, P.,Schwenke, H.,Knoth, J.

%D 2002
%J Hamburg Workshop "Application of Synchrotron Radiation in Chemistry-Status and Future"
%N 
%P  

%T SR-TXRF Analysis of Contamination on Wafer Surfaces - Energy-dispersive vs. Wavelength-dispersive Systems
%U 
 
%X