%0 conference paper,conference lecture
%@ 
%A Knoth, J.,Schwenke, H.,Eichinger, P.

%D 1994
%J Second International Symposium on Ultra-Clean Processing of Silicon Surfaces (UCPSS '94); Proceedings
%N 
%P 107-110 

%T Calibration of TXRF Equipment
%U 
 
%X