%0 journal article %@ 0584-8547 %A Wiener, G.,Guenther, R.,Michaelsen, C.,Knoth, J.,Schwenke, H.,Bormann, R. %D 1997 %J Spectrochimica Acta B %N %P 813-821 %T Ion beam sputtering techniques for high-resolution concentration depth profiling with glancing-incidence X-ray fluorescence spectrometry %U %X