@misc{jebril_using_thin_2009, 
author={Jebril, S.,Mishra, Y.K.,Elbahri, M.,Kienle, L.,Greve, H.,Quandt, E.,Adelung, R.},
title={Using thin film stress for nanoscaled sensors},
year={2009},
howpublished = {conference lecture: Berlin (D); 25.-29.08.2009},
note = {Online available at: \url{} (DOI). Jebril, S.; Mishra, Y.; Elbahri, M.; Kienle, L.; Greve, H.; Quandt, E.; Adelung, R.: Using thin film stress for nanoscaled sensors. International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2009. Berlin (D), 2009.}}