@misc{jebril_using_thin_2009, 
author={Jebril, S., Mishra, Y.K., Elbahri, M., Kienle, L., Greve, H., Quandt, E., Adelung, R.},
title={Using thin film stress for nanoscaled sensors},
year={2009},
howpublished = {conference lecture: Berlin (D);},
note = {Jebril, S.; Mishra, Y.; Elbahri, M.; Kienle, L.; Greve, H.; Quandt, E.; Adelung, R.: Using thin film stress for nanoscaled sensors. International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2009. Berlin (D), 2009.}}