@misc{zhou_structural_and_2007, author={Zhou, S.,Potzger, K.,Zhang, G.,Muecklich, A.,Eichhorn, F.,Schell, N.,Groetzschel, R.,Schmidt, B.,Skorupa, W.,Helm, M.,Fassbender, J.}, title={Structural and magnetic properties of Mn-implanted Si}, year={2007}, howpublished = {journal article}, doi = {https://doi.org/10.1103/PhysRevB.75.085203}, abstract = {Structural and magnetic properties in Mn-implanted, p-type Si were investigated. High resolution structural analysis techniques such as synchrotron x-ray diffraction revealed the formation of MnSi1.7 nanoparticles already in the as-implanted samples. Depending on the Mn fluence, the size increases from 5 nm to 20 nm upon rapid thermal annealing. No significant evidence is found for Mn substituting Si sites either in the as-implanted or annealed samples. The observed ferromagnetism yields a saturation moment of 0.21μB per implanted Mn at 10 K, which could be assigned to MnSi1.7 nanoparticles as revealed by a temperature-dependent magnetization measurement.}, note = {Online available at: \url{https://doi.org/10.1103/PhysRevB.75.085203} (DOI). Zhou, S.; Potzger, K.; Zhang, G.; Muecklich, A.; Eichhorn, F.; Schell, N.; Groetzschel, R.; Schmidt, B.; Skorupa, W.; Helm, M.; Fassbender, J.: Structural and magnetic properties of Mn-implanted Si. Physical Review B. 2007. vol. 75, no. 8, 085203. DOI: 10.1103/PhysRevB.75.085203}}